Excimer Laser Optics

  - Annealing windows
  - Annealing Seal windows

Key features

308nm Excimer Annealing Window

a)Material Fused Silica
b)Customer-specific geometries (lengths up to 1,500.0mm)
c)Plane and cylindrical optics within uniform surface quality

to minimize potential 

defects like mura and other performance defects.

a)Very high laser durability
b)Anti-reflective Coated [tabs>99%@308nm or uncoated
c)Available with new lens production and regeneration service.

Sapphire Windows
1. Sapphire Window Material : High-Purities Al2O3 (99.999%)

    High Environmental Durability  /  Easy Deposition
2. Size : 60.0mm x5.0mm(T) / 50.0mm x3.0mm(T)
    Anti-Reflection Coated (both sides)  
    Surface Precision <λ/6 @633nm  Wedge ≤10 arcsec
    High-transmittance 99%±@308nm  with wide spectrum
3. Clear Aperture : ≥ 85% of central diameter [both sides]
    Global Standard for Surface Quality and Durability
   └ MIL-PRF-13830b/ MIL-C-48497A

- OC Lens
- Mirror
- Beam Splitter